P-63: Using Two Closed-loop Control System and Least Squares Method to Adjust the Deposition Precision of Ink-jet Process for PLED Manufacture

When we use ink‐ jet technique for production, precise and stable deposition of droplets is a very important concern. Because the position of droplet jetted onto substrate was effected by too many factors even after droplet had been jetted, the positions of droplets from same nozzle are not the same...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2005-05, Vol.36 (1), p.518-521
Hauptverfasser: Lo, Yu-Cheng, Chien, Ching-Chun, Wang, Jiun-Ming, Li, Huai-An, Liu, Pei-Yu, Liu, Sheng-Fa
Format: Artikel
Sprache:eng
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Zusammenfassung:When we use ink‐ jet technique for production, precise and stable deposition of droplets is a very important concern. Because the position of droplet jetted onto substrate was effected by too many factors even after droplet had been jetted, the positions of droplets from same nozzle are not the same each time. For that reason, we use mathematical tools, regression analysis and least squares method, for adjustment to minimize the effect of position uncertainty. Further more, because all the steps of adjustment are done by program automatically and can be done in minutes, we can put it into production process as an additional closed‐loop control to improve stability of ink‐jet process.
ISSN:0097-966X
2168-0159
DOI:10.1889/1.2036489