Plasma beam alignment for the large-area substrates: Equipment and process

— We have developed an effective method for liquid‐crystal alignment of the large‐area substrates. This method is based on the oblique treatment of the alignment substrates with a “sheet” of accelerated plasma generated by the anode layer source of the “race track” geometry. During this treatment, the substrate or source is cyclically translated in the direction perpendicular to the plasma “sheet.” This method provides planar, tilted, and vertical liquid‐crystal alignment with excellent uniformity and reproducibility and easy axis control in the azimuthal and polar planes.