P-50: Distinguished Poster Paper: Arrays of Large Si Grains Grown at Room Temperature for x-Si TFTS

P-50: Distinguished Poster Paper: Arrays of Large Si Grains Grown at Room Temperature for x-Si TFTS

Arrays of large Si grains have been grown by phase‐modulated excimer‐laser annealing at room temperature. Home‐plate‐ and square‐shaped grains could be grown over the whole irradiated substrate area. These results indicate that the fabrication of x‐Si TFTs on glass is a realistic development target....

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Veröffentlicht in:SID International Symposium Digest of technical papers 2004-05, Vol.35 (1), p.434-437
Hauptverfasser: Jyumonji, Masayuki, Kimura, Yoshinobu, Hiramatsu, Masato, Kato, Tomoya, Ogawa, Hiroyuki, Akita, Noritaka, Taniguchi, Yukio, Matsumura, Masakiyo
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Sprache:eng
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Zusammenfassung:Arrays of large Si grains have been grown by phase‐modulated excimer‐laser annealing at room temperature. Home‐plate‐ and square‐shaped grains could be grown over the whole irradiated substrate area. These results indicate that the fabrication of x‐Si TFTs on glass is a realistic development target.
ISSN:0097-966X
2168-0159
DOI:10.1889/1.1831007