56.4: Invited Paper: Scaling-Up PECVD System for Large-Size Substrate Processing

With the prevailing of large panel TFT monitors, and most recently, LCD‐TVs, large‐size substrate processing becomes the mainstream of TFT‐LCD production. To enable this trend of ever‐increasing large area processing, AKT has successfully developed multiple generations of PECVD systems for volume production. This paper discusses the scaling up challenges from the equipment manufacturer's perspective, with the focus on the process scalability, system design optimization, productivity enhancement, and cost‐of‐ownership reduction.