Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications

This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4 layer deposited by...

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Veröffentlicht in:IEEJ Transactions on Sensors and Micromachines 2001/06/01, Vol.121(6), pp.325-330
Hauptverfasser: Hirota, Masaki, Satou, Fuminori, Morita, Shinichi
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container_title IEEJ Transactions on Sensors and Micromachines
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creator Hirota, Masaki
Satou, Fuminori
Morita, Shinichi
description This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4 layer deposited by LP-CVD achieve both high responsivity and an excellent time constant. A prototype sensor, having external dimensions of 160μm×160μm and six pairs of thermopiles, achieved responsivity of 2100V/W and a time constant of 25msec at a pressure of 7.33Pa. This Performance is suitable for automotive applications.
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subjects and Au-black
infrared sensors
thermoelectric
thermopiles
vehicles
title Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications
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