Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications
This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4 layer deposited by...
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Veröffentlicht in: | IEEJ Transactions on Sensors and Micromachines 2001/06/01, Vol.121(6), pp.325-330 |
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creator | Hirota, Masaki Satou, Fuminori Morita, Shinichi |
description | This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4 layer deposited by LP-CVD achieve both high responsivity and an excellent time constant. A prototype sensor, having external dimensions of 160μm×160μm and six pairs of thermopiles, achieved responsivity of 2100V/W and a time constant of 25msec at a pressure of 7.33Pa. This Performance is suitable for automotive applications. |
doi_str_mv | 10.1541/ieejsmas.121.325 |
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SM</addtitle><date>2001</date><risdate>2001</risdate><volume>121</volume><issue>6</issue><spage>325</spage><epage>330</epage><pages>325-330</pages><issn>1341-8939</issn><eissn>1347-5525</eissn><abstract>This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4 layer deposited by LP-CVD achieve both high responsivity and an excellent time constant. A prototype sensor, having external dimensions of 160μm×160μm and six pairs of thermopiles, achieved responsivity of 2100V/W and a time constant of 25msec at a pressure of 7.33Pa. This Performance is suitable for automotive applications.</abstract><pub>The Institute of Electrical Engineers of Japan</pub><doi>10.1541/ieejsmas.121.325</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record> |
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subjects | and Au-black infrared sensors thermoelectric thermopiles vehicles |
title | Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications |
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