Microwave induced structural-impurity ordering of transition region in Ta2O5 stacks on Si
Gespeichert in:
| Veröffentlicht in: | Semiconductor physics, quantum electronics, and optoelectronics quantum electronics, and optoelectronics, 2008-10, Vol.11 (4), p.311-318 |
|---|---|
| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 318 |
|---|---|
| container_issue | 4 |
| container_start_page | 311 |
| container_title | Semiconductor physics, quantum electronics, and optoelectronics |
| container_volume | 11 |
| creator | Kolyadina, E. Yu |
| description | |
| doi_str_mv | 10.15407/spqeo11.04.311 |
| format | Article |
| fullrecord | <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_15407_spqeo11_04_311</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_15407_spqeo11_04_311</sourcerecordid><originalsourceid>FETCH-LOGICAL-c166t-972334ce7f0883386d59b18c4f6233abb2a452da6ab9a7ff4791b942c9a7f1493</originalsourceid><addsrcrecordid>eNotkEtPwzAQhC0EEqVw5uo_4NTvxEdU8ZKKeqAcOFmOY1eGNgm2A-q_x4WeZmdWO9J-ANwSXBHBcb1I45cbCKkwrxghZ2BGJBZIioael1lIjBrM-CW4SukDYyaoxDPw_hJsHH7Mt4Oh7ybrOphynGyeotmhsB-nGPIBDrFzMfRbOHiYo-lTyGHoYXTbo4Qebgxdi3Jq7GeCJXoN1-DCm11yNyedg7eH-83yCa3Wj8_LuxWyRMqMVE0Z49bVHjcNY43shGpJY7mXZWHalhouaGekaZWpvee1Iq3i1B4d4YrNweK_t_yRUnRejzHsTTxogvUfGX0iozHXhQz7BRVPWM8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Microwave induced structural-impurity ordering of transition region in Ta2O5 stacks on Si</title><source>DOAJ Directory of Open Access Journals</source><creator>Kolyadina, E. Yu</creator><creatorcontrib>Kolyadina, E. Yu ; e-mail: konakova@isp.kiev.ua ; V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine 41 Nauky Prospect, 03028 Kyiv, Ukraine Phone: +(380-44) 525-61-82</creatorcontrib><identifier>ISSN: 1560-8034</identifier><identifier>EISSN: 1605-6582</identifier><identifier>DOI: 10.15407/spqeo11.04.311</identifier><language>eng</language><ispartof>Semiconductor physics, quantum electronics, and optoelectronics, 2008-10, Vol.11 (4), p.311-318</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c166t-972334ce7f0883386d59b18c4f6233abb2a452da6ab9a7ff4791b942c9a7f1493</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,860,27901,27902</link.rule.ids></links><search><creatorcontrib>Kolyadina, E. Yu</creatorcontrib><creatorcontrib>e-mail: konakova@isp.kiev.ua</creatorcontrib><creatorcontrib>V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine 41 Nauky Prospect, 03028 Kyiv, Ukraine Phone: +(380-44) 525-61-82</creatorcontrib><title>Microwave induced structural-impurity ordering of transition region in Ta2O5 stacks on Si</title><title>Semiconductor physics, quantum electronics, and optoelectronics</title><issn>1560-8034</issn><issn>1605-6582</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNotkEtPwzAQhC0EEqVw5uo_4NTvxEdU8ZKKeqAcOFmOY1eGNgm2A-q_x4WeZmdWO9J-ANwSXBHBcb1I45cbCKkwrxghZ2BGJBZIioael1lIjBrM-CW4SukDYyaoxDPw_hJsHH7Mt4Oh7ybrOphynGyeotmhsB-nGPIBDrFzMfRbOHiYo-lTyGHoYXTbo4Qebgxdi3Jq7GeCJXoN1-DCm11yNyedg7eH-83yCa3Wj8_LuxWyRMqMVE0Z49bVHjcNY43shGpJY7mXZWHalhouaGekaZWpvee1Iq3i1B4d4YrNweK_t_yRUnRejzHsTTxogvUfGX0iozHXhQz7BRVPWM8</recordid><startdate>20081030</startdate><enddate>20081030</enddate><creator>Kolyadina, E. Yu</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20081030</creationdate><title>Microwave induced structural-impurity ordering of transition region in Ta2O5 stacks on Si</title><author>Kolyadina, E. Yu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c166t-972334ce7f0883386d59b18c4f6233abb2a452da6ab9a7ff4791b942c9a7f1493</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kolyadina, E. Yu</creatorcontrib><creatorcontrib>e-mail: konakova@isp.kiev.ua</creatorcontrib><creatorcontrib>V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine 41 Nauky Prospect, 03028 Kyiv, Ukraine Phone: +(380-44) 525-61-82</creatorcontrib><collection>CrossRef</collection><jtitle>Semiconductor physics, quantum electronics, and optoelectronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kolyadina, E. Yu</au><aucorp>e-mail: konakova@isp.kiev.ua</aucorp><aucorp>V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine 41 Nauky Prospect, 03028 Kyiv, Ukraine Phone: +(380-44) 525-61-82</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Microwave induced structural-impurity ordering of transition region in Ta2O5 stacks on Si</atitle><jtitle>Semiconductor physics, quantum electronics, and optoelectronics</jtitle><date>2008-10-30</date><risdate>2008</risdate><volume>11</volume><issue>4</issue><spage>311</spage><epage>318</epage><pages>311-318</pages><issn>1560-8034</issn><eissn>1605-6582</eissn><doi>10.15407/spqeo11.04.311</doi><tpages>8</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1560-8034 |
| ispartof | Semiconductor physics, quantum electronics, and optoelectronics, 2008-10, Vol.11 (4), p.311-318 |
| issn | 1560-8034 1605-6582 |
| language | eng |
| recordid | cdi_crossref_primary_10_15407_spqeo11_04_311 |
| source | DOAJ Directory of Open Access Journals |
| title | Microwave induced structural-impurity ordering of transition region in Ta2O5 stacks on Si |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-05T07%3A44%3A00IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Microwave%20induced%20structural-impurity%20ordering%20of%20transition%20region%20in%20Ta2O5%20stacks%20on%20Si&rft.jtitle=Semiconductor%20physics,%20quantum%20electronics,%20and%20optoelectronics&rft.au=Kolyadina,%20E.%20Yu&rft.aucorp=e-mail:%20konakova@isp.kiev.ua&rft.date=2008-10-30&rft.volume=11&rft.issue=4&rft.spage=311&rft.epage=318&rft.pages=311-318&rft.issn=1560-8034&rft.eissn=1605-6582&rft_id=info:doi/10.15407/spqeo11.04.311&rft_dat=%3Ccrossref%3E10_15407_spqeo11_04_311%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |