Study on the Ionic Bombardment in a Glow Discharge Lamp

The surface of copper alloys was studied by means of a scanning electron microscope after having been sputtered by a glow discharge source under typical conditions for spectrochemical analysis. The surface topography developed during the process of sputtering gave the following two results: It would appear that the energy spread of the bombarding ions is small and the variation in the angles of incidence of these ions is less than usually accepted.