Development of a High Performance Linear Synchronous Motor for Improvement of Processing Capacity of Semiconductor Process Equipment

Linear motors can achieve much higher speed, quicker response, and more accurate positioning than ball screws. To achieve higher response in the linear motor positioning systems, force density and power rate in the linear motor characteristics must be improved. Therefore, it is important to know how to increase the magnetic and electric loading for the downsizing design of electrical machines. We have been studying high-density machine designing since we proposed a permanent magnet mover utilizing the magnetic flux concentration type surface permanent magnet array (CSPM array) for linear synchronous motors. To improve the linear motor performance utilizing the CSPM array, we have employed a CSPM array combined with the electrical steel sheets in mover and optimized the construction by means of the three-dimensional finite element method. This paper presents that the prototype model has a higher potential for use in the linear motor positioning systems.