Depth Profiling Analysis of Organic Materials by Using ToF-SIMS and Gradient Shaving Preparation

Several oblique cutting methods, including a recently developed gradient shaving preparation, for sample pretreatments have been developed. The combination of the above pretreatment method and time-of-flight secondary ion mass spectrometry provides very useful depth-profiling information in the analysis of organic materials for practical use. In this report, some results measured by combinations of the several oblique cutting methods and ToF-SIMS measurements are introduced.