103  GHz germanium-on-silicon photodiode enabled by an optimized U-shaped electrode

High-performance germanium photodiodes are crucial components in silicon photonic integrated circuits for large-capacity data communication. However, the bandwidths of most germanium photodiodes are limited by the intractable resistance–capacitance parasitic effect. Here, we introduce a unique U-shaped electrode to alleviate this issue, reducing the parasitic effect by 36% without compromising any other performance. Experimentally, a large bandwidth of 103 GHz, an optical responsivity of 0.95 A/W at 1550 nm, and a dark current as low as 1.3 nA are achieved, leading to a record high specific detectivity. This is the first breakthrough to 100 GHz bandwidth among all vertical germanium photodiodes, to the best of our knowledge. Open eye diagrams of 120 Gb/s on-off keying and 200 Gb/s four-level pulse amplitude signals are well received. This work provides a promising solution for chip-based ultra-fast photodetection.