Design and fabrication of a high-performance binary blazed grating coupler for perfectly perpendicular coupling

A high-performance binary blazed grating coupler (BBGC) on a silicon-on-insulator (SOI) platform for perfectly vertical coupling has been proposed. The period and the etching depth of the grating and the fill factors of the sub-gratings are simulated optimally with manufacturable feature sizes, and...

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Veröffentlicht in:Optics express 2021-12, Vol.29 (26), p.42999
Hauptverfasser: Xu, Jinbin, Yang, Sipan, Wu, Liying, Xu, Liping, Li, Yaqian, Liao, Rujun, Qu, Minni, Quan, Xueling, Cheng, Xiulan
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Sprache:eng
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Zusammenfassung:A high-performance binary blazed grating coupler (BBGC) on a silicon-on-insulator (SOI) platform for perfectly vertical coupling has been proposed. The period and the etching depth of the grating and the fill factors of the sub-gratings are simulated optimally with manufacturable feature sizes, and the coupling efficiency (CE) is as high as −1.78 dB at 1550 nm with a broad 3-dB bandwidth of around 100 nm. Then, a BBGC with the CE of −3.69 dB at 1550.5 nm and a 3-dB bandwidth of about 70 nm was experimentally demonstrated. Moreover, a large process tolerance of about 20 nm on the narrower sub-grating width was proved, achieving the insertion loss lower than −4.64 dB at 1550 nm. The realization of the BBGC on a SOI platform is simple, repeatable, and compatible with standard complementary metal-oxide semiconductor (CMOS) technology.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.448328