In-line characterization of nanostructures produced by roll-to-roll nanoimprinting

We present an in-line metrology solution for dimensional characterization of roll-to-roll imprinted nanostructures. The solution is based on a scatterometric analysis of optical data from a hyperspectral camera deployed at a production facility, where nanostructures are produced at speeds of 10m/min...

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Veröffentlicht in:Optics express 2021-02, Vol.29 (3), p.3882
Hauptverfasser: Skovlund Madsen, Jonas, Geisler, Mathias, Berri Lotz, Mikkel, Zalkovskij, Maksim, Bilenberg, Brian, Korhonen, Raimo, Peltonen, Petri, Erik Hansen, Poul, Alkærsig Jensen, Søren
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Sprache:eng
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Zusammenfassung:We present an in-line metrology solution for dimensional characterization of roll-to-roll imprinted nanostructures. The solution is based on a scatterometric analysis of optical data from a hyperspectral camera deployed at a production facility, where nanostructures are produced at speeds of 10m/min. The system combines the ease of use of a real-space imaging system with the spectral information used in scatterometry. We present nanoscale dimensional measurements on one-dimensional line gratings with various periods and orientations. The depths of the produced structures are accurately characterized with uncertainties on the scale of a few nanometers. The hyperspectral imaging capabilities of the system can also be used to avoid vibrational effects.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.411669