Standing-wave interferometer based on single-layer SiO 2 nano-sphere scattering

An optical standing-wave interferometer based on the detection of scattered light is proposed in this study. By inserting an ultra-thin scattering plate into the optical standing-wave field and detecting the scattered light, the intensity of the optical standing-wave field can be observed. The phase quadrature detection technique using two scattering plates is developed for measuring the displacement. The experimental results demonstrate that the measurement resolution and range can reach nanometer and micrometer levels, respectively.