Development of an Ultra-Thin Dicing Blade Applying Ultra-Violet Curable Resin

The thermosetting resin has been used as the bonding agent to produce traditional dicing blades. lt takes usually several hours for curing process and requires lapping process to true the blade shape. These are the causes of high manufacturing costs. In general, the use of ultra-violet curable resin as the bonding agent can greatly reduce manufacturing costs by reducing the curing time from hours to minutes. Dicing blades with ultra-violet curable resin have been developed to solve such problems. We proposed and developed a new producing method to obtain ultra thin dicing blades with ultra-violet curable resin. lt is called the spin-coating process using centrifugal force that drives deposited resin flow radically outward on the disk. And in order to improve the mechanical characteristics of the blades, some kinds of abrasive grains and fibers as the filler were mixed with resin. With those blades we have carried out the cutting tests on silicon wafers. As the result, in comparison with the existing thermosetting resin blade, the mechanical characteristics and the chipping distributions have been improved.