Development of Measuring Method for Shape and Dimension of Micro-components : Modification to the Original Measuring System, Calibration of the Probes and the Results of Dimensional Measurements

In order to facilitate the advancement of micro machine technology and to encourage its use across a wider range of industrial fields, measuring technology appears to be essential. For the development of micromachines and microfabrication technologies, it is necessary to devise a technique to measure both profile and dimension of micro-components. Some researches on measuring methods for micro-boreholes in the micrometer range have been reported. However, general-purpose CMM for both form and dimensional metrology on micro-system components has not been realized yet. To this end, one of the authors tried to develop a small three dimensional form measuring apparatus which has non-contact probe detecting proximity to measuring object through tunneling effect, and the results has already been reported. In this paper, measurement not only form but also dimension of micro-components are tried. Modified device and the calibration technique for micro-probes are explained in detail, and then several measuring results are shown.