Research on suspended microparticles’ transport driven by reflective acoustic streaming micropump

A reflective acoustic streaming micropump was designed in this study. After proposing the micropump structure model, the best driving frequency of 11,548,960 Hz was determined from modal analysis. Then the acoustic pressure field and the acoustic instantaneous intensity distribution were studied. The streaming velocity in the pump chamber was calculated and the maximum velocity reached 3 mm/s. The maximum velocity of the suspended microparticles was 1.0938 mm/s, and the influence factors on the microparticles movement were discussed. The microparticle movement was determined by acoustic streaming when microparticle diameter was less than 2 µm and the acoustic radiation force became dominated when microparticle diameter was more than 5 µm.