Two-stage decoupled micro-machined gyroscope and noncontact vibration test

By introducing the working principle of the two-stage decoupled micro-machined gyroscope, the vibration equation of the driving mode is established. Using Laplace transform, the differential equation and the analytical solution are solved, and the amplitude–frequency characteristics of the driving mode are obtained. Moreover, this article introduces the hardware of the noncontact vibration measurement system and the algorithm. By experiments, the characteristic of vibration of the tested micro-machined gyroscope is obtained. Experimental results indicate that the precision of the amplitude is 0.1 µm, and the two-stage decoupled micro-machined gyroscope is immune to mechanical coupling and has high linearity inherently.