(Invited) Hybrid Bonding-Based Interconnects: A Status on the Last Robustness and Reliability Achievements
Gespeichert in:
Veröffentlicht in: | ECS Meeting Abstracts 2021-10, Vol.MA2021-02 (14), p.662-662 |
---|---|
Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | 662 |
---|---|
container_issue | 14 |
container_start_page | 662 |
container_title | ECS Meeting Abstracts |
container_volume | MA2021-02 |
creator | Moreau, Stéphane Jourdon, Joris Lhostis, Sandrine Bouchu, David Ayoub, Bassel Arnaud, Lucile Fremont, Helene |
description | |
doi_str_mv | 10.1149/MA2021-0214662mtgabs |
format | Article |
fullrecord | <record><control><sourceid>hal_O3W</sourceid><recordid>TN_cdi_crossref_primary_10_1149_MA2021_0214662mtgabs</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>oai_HAL_hal_03467419v1</sourcerecordid><originalsourceid>FETCH-LOGICAL-c120s-5b6d3012faab6414235b677c7d765377fd4bdfcd193cc1b5ae4a437e15765c523</originalsourceid><addsrcrecordid>eNp9kE1LAzEQhoMoWKv_wEOO9rCar9203rZFbWFFqHoO-do2ZZuUTVrov3fLSsGLh2GGd95nYF4A7jF6xJhNnt5LggjOumJFQbZpJVW8AAOCc5wRRPPL88zoNbiJcYMQHY8JGYDNw8IfXLJmBOdH1ToDp8Eb51fZVEZr4MIn2-rgvdUpPsMSfiaZ9hEGD9PawkrGBJdB7WPyNkYovYFL2zipXOPSEZZ67ezBbq1P8RZc1bKJ9u63D8H368vXbJ5VH2-LWVllGhMUs1wVhiJMailVwTAjtFM419zwIqec14YpU2uDJ1RrrHJpmWSUW5x3e50TOgSj_u5aNmLXuq1sjyJIJ-ZlJU4aoqzgDE8OuPOy3qvbEGNr6zOAkThlK_psxZ9sOwz1mAs7sQn71ncP_Y_8APP4fXE</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>(Invited) Hybrid Bonding-Based Interconnects: A Status on the Last Robustness and Reliability Achievements</title><source>IOP Publishing Free Content</source><creator>Moreau, Stéphane ; Jourdon, Joris ; Lhostis, Sandrine ; Bouchu, David ; Ayoub, Bassel ; Arnaud, Lucile ; Fremont, Helene</creator><creatorcontrib>Moreau, Stéphane ; Jourdon, Joris ; Lhostis, Sandrine ; Bouchu, David ; Ayoub, Bassel ; Arnaud, Lucile ; Fremont, Helene</creatorcontrib><identifier>ISSN: 2151-2043</identifier><identifier>ISSN: 1091-8213</identifier><identifier>EISSN: 2151-2035</identifier><identifier>DOI: 10.1149/MA2021-0214662mtgabs</identifier><language>eng</language><publisher>The Electrochemical Society, Inc</publisher><subject>Engineering Sciences ; Micro and nanotechnologies ; Microelectronics</subject><ispartof>ECS Meeting Abstracts, 2021-10, Vol.MA2021-02 (14), p.662-662</ispartof><rights>2021 ECS - The Electrochemical Society</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><orcidid>0000-0001-6594-1686</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1149/MA2021-0214662mtgabs/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>230,314,780,784,885,27923,27924,38889,53866</link.rule.ids><linktorsrc>$$Uhttps://iopscience.iop.org/article/10.1149/MA2021-0214662mtgabs$$EView_record_in_IOP_Publishing$$FView_record_in_$$GIOP_Publishing</linktorsrc><backlink>$$Uhttps://hal.science/hal-03467419$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Moreau, Stéphane</creatorcontrib><creatorcontrib>Jourdon, Joris</creatorcontrib><creatorcontrib>Lhostis, Sandrine</creatorcontrib><creatorcontrib>Bouchu, David</creatorcontrib><creatorcontrib>Ayoub, Bassel</creatorcontrib><creatorcontrib>Arnaud, Lucile</creatorcontrib><creatorcontrib>Fremont, Helene</creatorcontrib><title>(Invited) Hybrid Bonding-Based Interconnects: A Status on the Last Robustness and Reliability Achievements</title><title>ECS Meeting Abstracts</title><addtitle>Meet. Abstr</addtitle><subject>Engineering Sciences</subject><subject>Micro and nanotechnologies</subject><subject>Microelectronics</subject><issn>2151-2043</issn><issn>1091-8213</issn><issn>2151-2035</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNp9kE1LAzEQhoMoWKv_wEOO9rCar9203rZFbWFFqHoO-do2ZZuUTVrov3fLSsGLh2GGd95nYF4A7jF6xJhNnt5LggjOumJFQbZpJVW8AAOCc5wRRPPL88zoNbiJcYMQHY8JGYDNw8IfXLJmBOdH1ToDp8Eb51fZVEZr4MIn2-rgvdUpPsMSfiaZ9hEGD9PawkrGBJdB7WPyNkYovYFL2zipXOPSEZZ67ezBbq1P8RZc1bKJ9u63D8H368vXbJ5VH2-LWVllGhMUs1wVhiJMailVwTAjtFM419zwIqec14YpU2uDJ1RrrHJpmWSUW5x3e50TOgSj_u5aNmLXuq1sjyJIJ-ZlJU4aoqzgDE8OuPOy3qvbEGNr6zOAkThlK_psxZ9sOwz1mAs7sQn71ncP_Y_8APP4fXE</recordid><startdate>20211019</startdate><enddate>20211019</enddate><creator>Moreau, Stéphane</creator><creator>Jourdon, Joris</creator><creator>Lhostis, Sandrine</creator><creator>Bouchu, David</creator><creator>Ayoub, Bassel</creator><creator>Arnaud, Lucile</creator><creator>Fremont, Helene</creator><general>The Electrochemical Society, Inc</general><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope><orcidid>https://orcid.org/0000-0001-6594-1686</orcidid></search><sort><creationdate>20211019</creationdate><title>(Invited) Hybrid Bonding-Based Interconnects: A Status on the Last Robustness and Reliability Achievements</title><author>Moreau, Stéphane ; Jourdon, Joris ; Lhostis, Sandrine ; Bouchu, David ; Ayoub, Bassel ; Arnaud, Lucile ; Fremont, Helene</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c120s-5b6d3012faab6414235b677c7d765377fd4bdfcd193cc1b5ae4a437e15765c523</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Engineering Sciences</topic><topic>Micro and nanotechnologies</topic><topic>Microelectronics</topic><toplevel>online_resources</toplevel><creatorcontrib>Moreau, Stéphane</creatorcontrib><creatorcontrib>Jourdon, Joris</creatorcontrib><creatorcontrib>Lhostis, Sandrine</creatorcontrib><creatorcontrib>Bouchu, David</creatorcontrib><creatorcontrib>Ayoub, Bassel</creatorcontrib><creatorcontrib>Arnaud, Lucile</creatorcontrib><creatorcontrib>Fremont, Helene</creatorcontrib><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>ECS Meeting Abstracts</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Moreau, Stéphane</au><au>Jourdon, Joris</au><au>Lhostis, Sandrine</au><au>Bouchu, David</au><au>Ayoub, Bassel</au><au>Arnaud, Lucile</au><au>Fremont, Helene</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>(Invited) Hybrid Bonding-Based Interconnects: A Status on the Last Robustness and Reliability Achievements</atitle><jtitle>ECS Meeting Abstracts</jtitle><addtitle>Meet. Abstr</addtitle><date>2021-10-19</date><risdate>2021</risdate><volume>MA2021-02</volume><issue>14</issue><spage>662</spage><epage>662</epage><pages>662-662</pages><issn>2151-2043</issn><issn>1091-8213</issn><eissn>2151-2035</eissn><pub>The Electrochemical Society, Inc</pub><doi>10.1149/MA2021-0214662mtgabs</doi><tpages>1</tpages><orcidid>https://orcid.org/0000-0001-6594-1686</orcidid></addata></record> |
fulltext | fulltext_linktorsrc |
identifier | ISSN: 2151-2043 |
ispartof | ECS Meeting Abstracts, 2021-10, Vol.MA2021-02 (14), p.662-662 |
issn | 2151-2043 1091-8213 2151-2035 |
language | eng |
recordid | cdi_crossref_primary_10_1149_MA2021_0214662mtgabs |
source | IOP Publishing Free Content |
subjects | Engineering Sciences Micro and nanotechnologies Microelectronics |
title | (Invited) Hybrid Bonding-Based Interconnects: A Status on the Last Robustness and Reliability Achievements |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-11T13%3A25%3A28IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-hal_O3W&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=(Invited)%20Hybrid%20Bonding-Based%20Interconnects:%20A%20Status%20on%20the%20Last%20Robustness%20and%20Reliability%20Achievements&rft.jtitle=ECS%20Meeting%20Abstracts&rft.au=Moreau,%20St%C3%A9phane&rft.date=2021-10-19&rft.volume=MA2021-02&rft.issue=14&rft.spage=662&rft.epage=662&rft.pages=662-662&rft.issn=2151-2043&rft.eissn=2151-2035&rft_id=info:doi/10.1149/MA2021-0214662mtgabs&rft_dat=%3Chal_O3W%3Eoai_HAL_hal_03467419v1%3C/hal_O3W%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |