Communication-Electrochemical Micro-Machining with Adjustable Resistance

In electrochemical micromachining technique using ultra short pulses, the pulse duration is the only effective control parameter of the machining resolution. Here, we added an adjustable resistance in the equivalent circuit of the electrochemical micromachining. The machining resolution depends on b...

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Veröffentlicht in:Journal of the Electrochemical Society 2017-01, Vol.164 (14), p.E572-E574
Hauptverfasser: Xu, Lizhong, Bai, Xiaoyang, Zhao, Chuanjun
Format: Artikel
Sprache:eng
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Zusammenfassung:In electrochemical micromachining technique using ultra short pulses, the pulse duration is the only effective control parameter of the machining resolution. Here, we added an adjustable resistance in the equivalent circuit of the electrochemical micromachining. The machining resolution depends on both the pulse duration and the adjustable resistance. So, the adjustable resistance can be taken as another control parameter for the machining resolution. As the adjustable resistance increases, the machining resolution can be improved. This technique was used for machining micro beams, and a good machining resolution was achieved.
ISSN:0013-4651
1945-7111
DOI:10.1149/2.1581714jes