Low Temperature Deposition of WN x C y Diffusion Barriers Using WN(NEt 2 ) 3 as a Single-Source Precursor
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| Veröffentlicht in: | ECS journal of solid state science and technology 2015, Vol.4 (1), p.N3180-N3187 |
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| Sprache: | eng |
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| container_end_page | N3187 |
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| container_issue | 1 |
| container_start_page | N3180 |
| container_title | ECS journal of solid state science and technology |
| container_volume | 4 |
| creator | O’Donohue, C. T. McClain, K. R. Koley, A. Revelli, J. C. McElwee-White, L. Anderson, T. J. |
| description | |
| doi_str_mv | 10.1149/2.0251501jss |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 2162-8769 |
| ispartof | ECS journal of solid state science and technology, 2015, Vol.4 (1), p.N3180-N3187 |
| issn | 2162-8769 2162-8777 |
| language | eng |
| recordid | cdi_crossref_primary_10_1149_2_0251501jss |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| title | Low Temperature Deposition of WN x C y Diffusion Barriers Using WN(NEt 2 ) 3 as a Single-Source Precursor |
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