Structural, Morphological, and Optoelectronic Properties of RF Sputtered AZO Thin Films on Glass and Polymer Substrates: A Comparative Study

This paper investigates the thickness-dependent structural, morphological, and optoelectronic properties of Al-doped ZnO (AZO) thin films deposited on glass and flexible polyethylene terephthalate (PET) substrates via confocal magnetron sputtering. The film’s thickness ranged from 50 to 130 nm. X-ra...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:ECS journal of solid state science and technology 2024-10, Vol.13 (10), p.103004
Hauptverfasser: Mendil, Djelloul, Touam, Tahar, Chelouche, Azeddine, Djermoune, Atmane, Boudaa, Mokhtar, Challali, Fatiha
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:This paper investigates the thickness-dependent structural, morphological, and optoelectronic properties of Al-doped ZnO (AZO) thin films deposited on glass and flexible polyethylene terephthalate (PET) substrates via confocal magnetron sputtering. The film’s thickness ranged from 50 to 130 nm. X-ray diffraction results show that all AZO films on glass have better structural properties than those on PET. Furthermore, the (002) peak intensity and crystallite size on both substrates improved progressively with thickness. Field emission scanning electron microscopy and atomic force microscopy images revealed that the film morphology and surface roughness are dependent on substrate and thickness. According to the UV–vis-NIR measurement results, the air-referenced transmittance spectra of films on PET were slightly lower than those on glass; however, compared to films on glass, the substrate-referenced transmittance of PET films was higher. Moreover, for both substrates, it is found that the bandgap of fabricated thin films decreases with thickness. Photoluminescence spectra show that for glass and PET substrates, the total luminescence of AZO decreases with increasing film thickness and that green and red emissions are absent from AZO films deposited on PET substrates. AZO films deposited on glass substrates exhibit superior electrical and optoelectronic characteristics.
ISSN:2162-8769
2162-8777
DOI:10.1149/2162-8777/ad7ef9