Top-Down Processed SOI Nanowire Devices for Biomedical Applications

We present silicon nanowire (SiNW) devices, which were fabricated in a top-down process from silicon-on-insulator (SOI) substrates with a high yield. Electronic characterization proved reliable electronic properties. Here we report the versatile use of the devices in different applications like label-free sensing of DNA hybridization, electronic detection of cellular signals, and detection of proteins. Compared to micro-sized devices, the SiNWs show an improved sensitivity. Analyses of the electronic cell-nanowire contact showed that the important seal resistance is largely increased, which is a prerequisite for highly-sensitive detection of cellular activity. In all applications the SiNW devices show a reliable performance and are highly interesting for future biomedical products.