Effluent Management for Non-Oxidizing Plasma Strip Processes

This paper reports on the techniques employed to control the re-deposition of the partially dissociated organic photoresist (PR) by-products in advanced non-oxidizing strip processes developed to meet the PR removal requirements of future technology nodes. System features, such as the design of heated process chamber walls and an on-board, RF-based oxygen plasma effluent abatement system are described in detail. The performance of these features to prevent or eliminate hydrocarbon buildup and manage effluent with non-oxidizing strip processes is also presented and discussed.