Molecular Layer Deposition of Conductive Hybrid Organic-Inorganic Thin Films Using Diethylzinc and Hydroquinone

Conductive hybrid organic-inorganic thin films were fabricated by molecular layer deposition (MLD) methods using diethyl zinc (DEZ) and hydroquinone (HQ). Sequential exposures of DEZ and HQ led to linear MLD film growth. The mass gains measured by quartz crystal microbalance investigations were 52.3 ng/cm2 per MLD cycle. Scanning electron microscope images of focused ion beam milled cross-sections of the MLD film were consistent with a MLD growth of 1.6 Aå per cycle at 150oC. The DEZ/HQ MLD films were conductive based on four-point electrical probe measurements.