Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species
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| Veröffentlicht in: | Journal of the Electrochemical Society 2011, Vol.158 (5), p.D259 |
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| container_issue | 5 |
| container_start_page | D259 |
| container_title | Journal of the Electrochemical Society |
| container_volume | 158 |
| creator | Delabie, Annelies Swerts, Johan Elshocht, Sven Van Jung, Sung-Hoon Raisanen, Petri I. Givens, Michael E. Shero, Eric J. Peeters, Jozef Machkaoutsan, Vladimir Maes, Jan Willem |
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| doi_str_mv | 10.1149/1.3561423 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0013-4651 |
| ispartof | Journal of the Electrochemical Society, 2011, Vol.158 (5), p.D259 |
| issn | 0013-4651 |
| language | eng |
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| source | IOP Publishing Journals |
| title | Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species |
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