(Invited) Strain Scaling and Modeling for FETs

Stress engineering overview is given including the reasons behind its ongoing evolution. Some aspects of the stress-induced defect formation are discussed. Guidelines for avoiding such defects are proposed based on stress evolution in and around transistors during the process flow. Stress-induced pe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Moroz, Victor, Choi, Munkang
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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