Fabrication and Characterization of Polysilicon-Based Clamped-Clamped Filter

The rapid growth of micromaching technology make the miniaturized or integrated MEMS resonator or filter be possible. This paper reports on the fabrication and characterization of the polysilicon-based RF MEMS filter, comprised of the two clamped-clamped resonator coupled with the micro dimensions beam. The surface micromaching technology has been adopted to fabricate the clamped-clamped filter. The fabricating process and the optimization of the typical micromaching process for the MEMS RF filter are illustrated in detail. After the fabrication, the resonating characteristics are measured. The center frequency of 30 MHz of the micromechanical bandpass filter is demonstrated