Morphology, Composition and Electrical properties of Thin Anodic Oxides on InP

Depending on the applied electrochemical parameters, various anodic films can be grown onto InP in aqueous media. In borate buffer at pH = 9, the formation of homogeneous and thin InPO4-like films occurred when anodic treatment is performed with a low current density, while with higher imposed current configuration porous and thicker layers are grown. In this work, AFM measurements coupled with XPS analyses and capacitance-voltage investigations have been used to study the relationship between morphology, composition and electrical properties of different anodic oxide films performed on InP surface, with current densities ranging from 1 mA.cm-2 to 100 mA.cm-2.