Design and Fabrication of Extended-Bandwidth Rugate Filters Made of Porous Silicon

Design and Fabrication of Extended-Bandwidth Rugate Filters Made of Porous Silicon

We designed and fabricated porous silicon-based broadband rugate filters by combining up to seven rugate structures. A near-infrared stop-band filter having a reflection band width of 1926 nm with no higher-order harmonics and very small sidelobes were realized. The suppression of higher-order harmo...

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Veröffentlicht in:ECS transactions 2009, Vol.16 (3), p.55-59
Hauptverfasser: Ishikura, Nobuyuki, Fujii, Minoru, Nishida, Kohei, Hayashi, Shinji, Diener, Joachim, Mizuhata, Minoru, Deki, Shigehito
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Sprache:eng
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Zusammenfassung:We designed and fabricated porous silicon-based broadband rugate filters by combining up to seven rugate structures. A near-infrared stop-band filter having a reflection band width of 1926 nm with no higher-order harmonics and very small sidelobes were realized. The suppression of higher-order harmonics and the reduction of sidelobes also allowed us to produce a high quality pass-band filter having three high transmittance regions consisting of broad stop-bands.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.2982541