Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Journal of the Electrochemical Society 2008, Vol.155 (10), p.G224
Hauptverfasser:	Volksen, Willi, Dubois, Geraud, Kellock, Andrew, Magbitang, Teddie P., Miller, Robert D., Miller, Dolores, Cohen, Stephan, Simonyi, Eva E., Ramirez, Lynher, Markle, David, Chen, Shaoyin, Zhou, Senquan, Wang, XiaoRu, Wang, Yun
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

container_end_page
container_issue	10
container_start_page	G224
container_title	Journal of the Electrochemical Society
container_volume	155
creator	Volksen, Willi Dubois, Geraud Kellock, Andrew Magbitang, Teddie P. Miller, Robert D. Miller, Dolores Cohen, Stephan Simonyi, Eva E. Ramirez, Lynher Markle, David Chen, Shaoyin Zhou, Senquan Wang, XiaoRu Wang, Yun
description
doi_str_mv	10.1149/1.2966222
format	Article
fullrecord	<record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1149_1_2966222</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1149_1_2966222</sourcerecordid><originalsourceid>FETCH-LOGICAL-c264t-66f59097d86ce8fe08185e3bbc47cd26eb9e1474e8967af9661d117b90fcf4423</originalsourceid><addsrcrecordid>eNotjz1PwzAYhD2ARCkM_AOvDCl-HccfY1UVihTUoWW2HOd1CU2dyo6E-u8JotPdSafTPYQ8AVsACPMCC26k5JzfkBljUBZCVnBH7nP-niJooWZk84H-y8XOu56u4-Q8njCOdAi0Hn6KI92mg4tD7vqpMmKmzYXWLmOiu3N3RLqMEV3fxcMDuQ2uz_h41Tn5fF3vV5ui3r69r5Z14bkUYyFlqAwzqtXSow7INOgKy6bxQvmWS2wMglACtZHKhek_tACqMSz4IAQv5-T5f9enIeeEwZ5Td3LpYoHZP2wL9opd_gJ3M0t8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing</title><source>IOP Publishing Journals</source><creator>Volksen, Willi ; Dubois, Geraud ; Kellock, Andrew ; Magbitang, Teddie P. ; Miller, Robert D. ; Miller, Dolores ; Cohen, Stephan ; Simonyi, Eva E. ; Ramirez, Lynher ; Markle, David ; Chen, Shaoyin ; Zhou, Senquan ; Wang, XiaoRu ; Wang, Yun</creator><creatorcontrib>Volksen, Willi ; Dubois, Geraud ; Kellock, Andrew ; Magbitang, Teddie P. ; Miller, Robert D. ; Miller, Dolores ; Cohen, Stephan ; Simonyi, Eva E. ; Ramirez, Lynher ; Markle, David ; Chen, Shaoyin ; Zhou, Senquan ; Wang, XiaoRu ; Wang, Yun</creatorcontrib><identifier>ISSN: 0013-4651</identifier><identifier>DOI: 10.1149/1.2966222</identifier><language>eng</language><ispartof>Journal of the Electrochemical Society, 2008, Vol.155 (10), p.G224</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c264t-66f59097d86ce8fe08185e3bbc47cd26eb9e1474e8967af9661d117b90fcf4423</citedby><cites>FETCH-LOGICAL-c264t-66f59097d86ce8fe08185e3bbc47cd26eb9e1474e8967af9661d117b90fcf4423</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,4010,27900,27901,27902</link.rule.ids></links><search><creatorcontrib>Volksen, Willi</creatorcontrib><creatorcontrib>Dubois, Geraud</creatorcontrib><creatorcontrib>Kellock, Andrew</creatorcontrib><creatorcontrib>Magbitang, Teddie P.</creatorcontrib><creatorcontrib>Miller, Robert D.</creatorcontrib><creatorcontrib>Miller, Dolores</creatorcontrib><creatorcontrib>Cohen, Stephan</creatorcontrib><creatorcontrib>Simonyi, Eva E.</creatorcontrib><creatorcontrib>Ramirez, Lynher</creatorcontrib><creatorcontrib>Markle, David</creatorcontrib><creatorcontrib>Chen, Shaoyin</creatorcontrib><creatorcontrib>Zhou, Senquan</creatorcontrib><creatorcontrib>Wang, XiaoRu</creatorcontrib><creatorcontrib>Wang, Yun</creatorcontrib><title>Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing</title><title>Journal of the Electrochemical Society</title><issn>0013-4651</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNotjz1PwzAYhD2ARCkM_AOvDCl-HccfY1UVihTUoWW2HOd1CU2dyo6E-u8JotPdSafTPYQ8AVsACPMCC26k5JzfkBljUBZCVnBH7nP-niJooWZk84H-y8XOu56u4-Q8njCOdAi0Hn6KI92mg4tD7vqpMmKmzYXWLmOiu3N3RLqMEV3fxcMDuQ2uz_h41Tn5fF3vV5ui3r69r5Z14bkUYyFlqAwzqtXSow7INOgKy6bxQvmWS2wMglACtZHKhek_tACqMSz4IAQv5-T5f9enIeeEwZ5Td3LpYoHZP2wL9opd_gJ3M0t8</recordid><startdate>2008</startdate><enddate>2008</enddate><creator>Volksen, Willi</creator><creator>Dubois, Geraud</creator><creator>Kellock, Andrew</creator><creator>Magbitang, Teddie P.</creator><creator>Miller, Robert D.</creator><creator>Miller, Dolores</creator><creator>Cohen, Stephan</creator><creator>Simonyi, Eva E.</creator><creator>Ramirez, Lynher</creator><creator>Markle, David</creator><creator>Chen, Shaoyin</creator><creator>Zhou, Senquan</creator><creator>Wang, XiaoRu</creator><creator>Wang, Yun</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2008</creationdate><title>Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing</title><author>Volksen, Willi ; Dubois, Geraud ; Kellock, Andrew ; Magbitang, Teddie P. ; Miller, Robert D. ; Miller, Dolores ; Cohen, Stephan ; Simonyi, Eva E. ; Ramirez, Lynher ; Markle, David ; Chen, Shaoyin ; Zhou, Senquan ; Wang, XiaoRu ; Wang, Yun</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c264t-66f59097d86ce8fe08185e3bbc47cd26eb9e1474e8967af9661d117b90fcf4423</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Volksen, Willi</creatorcontrib><creatorcontrib>Dubois, Geraud</creatorcontrib><creatorcontrib>Kellock, Andrew</creatorcontrib><creatorcontrib>Magbitang, Teddie P.</creatorcontrib><creatorcontrib>Miller, Robert D.</creatorcontrib><creatorcontrib>Miller, Dolores</creatorcontrib><creatorcontrib>Cohen, Stephan</creatorcontrib><creatorcontrib>Simonyi, Eva E.</creatorcontrib><creatorcontrib>Ramirez, Lynher</creatorcontrib><creatorcontrib>Markle, David</creatorcontrib><creatorcontrib>Chen, Shaoyin</creatorcontrib><creatorcontrib>Zhou, Senquan</creatorcontrib><creatorcontrib>Wang, XiaoRu</creatorcontrib><creatorcontrib>Wang, Yun</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of the Electrochemical Society</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Volksen, Willi</au><au>Dubois, Geraud</au><au>Kellock, Andrew</au><au>Magbitang, Teddie P.</au><au>Miller, Robert D.</au><au>Miller, Dolores</au><au>Cohen, Stephan</au><au>Simonyi, Eva E.</au><au>Ramirez, Lynher</au><au>Markle, David</au><au>Chen, Shaoyin</au><au>Zhou, Senquan</au><au>Wang, XiaoRu</au><au>Wang, Yun</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing</atitle><jtitle>Journal of the Electrochemical Society</jtitle><date>2008</date><risdate>2008</risdate><volume>155</volume><issue>10</issue><spage>G224</spage><pages>G224-</pages><issn>0013-4651</issn><doi>10.1149/1.2966222</doi><oa>free_for_read</oa></addata></record>
fulltext	fulltext
identifier	ISSN: 0013-4651
ispartof	Journal of the Electrochemical Society, 2008, Vol.155 (10), p.G224
issn	0013-4651
language	eng
recordid	cdi_crossref_primary_10_1149_1_2966222
source	IOP Publishing Journals
title	Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-16T02%3A04%3A18IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Mechanical%20Enhancement%20of%20Low-k%20Organosilicates%20by%20Laser%20Spike%20Annealing&rft.jtitle=Journal%20of%20the%20Electrochemical%20Society&rft.au=Volksen,%20Willi&rft.date=2008&rft.volume=155&rft.issue=10&rft.spage=G224&rft.pages=G224-&rft.issn=0013-4651&rft_id=info:doi/10.1149/1.2966222&rft_dat=%3Ccrossref%3E10_1149_1_2966222%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true