MIMC Reliability and Electrical Behavior Defined by a Physical Layer Properties of the Dielectric

MIMC Reliability and Electrical Behavior Defined by a Physical Layer Properties of the Dielectric

Metal-Insulator-Metal Capacitor (MIMC) reliability and electrical properties are defined by the TDDB lifetime, breakdown voltage and leakage current. This article demonstrates the correlation between these electrical properties and the physical properties of the dielectric layer. The intrinsic quali...

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Veröffentlicht in:ECS transactions 2008-05, Vol.13 (2), p.83-90
Hauptverfasser: Charavel, Rémy, Ackaert, Jan, Dhont, Kurt, Vlachakis, B., De Schepper, L., Millecam, M., Vandevelde, E., Bogaert, P., De Backer, E., Iline, A., Vlad, Alexandru, Raskin, J.-P.
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Sprache:eng
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Zusammenfassung:Metal-Insulator-Metal Capacitor (MIMC) reliability and electrical properties are defined by the TDDB lifetime, breakdown voltage and leakage current. This article demonstrates the correlation between these electrical properties and the physical properties of the dielectric layer. The intrinsic quality of MIMC capacitors can therefore be predicted before complete processing by measuring a physical property of the MIMC dielectric.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.2908620