Magnetic Abrasive Finishing Using Nano-size Diamond Dispersed Co-Ni Electroless Plated Plastic Balls and its Application to Post CMP Process

Magnetic Abrasive Particles (MAPs) were successfully prepared by a new technique based on the nickel-cobalt diamond composite plated plastic ball. The finishing results for Damascene samples proved the powerful ability of the new MAPs for application in fabricating electronic devices. In this report, a new process for the preparation of bound MAPs based on the electroless cobalt-nickel boron diamond composite plating on plastic balls is described. Here, plastic balls were used as a support for the growth of MAPs due to its lightweight properties. This work aims to develop lightweight and forceful MAPs. Magnetic field assisted finishing was performed to examine the fabricated MAPs. The AFM images showed the changes in the surface profile before and after finishing by cobalt-nickel diamond composite plated plastic balls for 10 minutes. The AFM images for the sample after MAF suggest that surface smoothing could be attained and that nano-level polishing could be achieved by this method.