Embedding Device Solutions in Engineered Substrates
A review of the advances in Smart Cut engineered substrates and the impact on device performance and IC design will be given. while primarily focusing on CMOS applications, the application of substrate engineering to other fields like photonics, power ICs, nano-patterning while also be reviewed.
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| Format: | Tagungsbericht |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A review of the advances in Smart Cut engineered substrates and the impact on device performance and IC design will be given. while primarily focusing on CMOS applications, the application of substrate engineering to other fields like photonics, power ICs, nano-patterning while also be reviewed. |
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| ISSN: | 1938-5862 1938-6737 |
| DOI: | 10.1149/1.2728835 |