Epitaxial Growth of Silicon by Vacuum Sublimation
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Veröffentlicht in: | Journal of the Electrochemical Society 1964, Vol.111 (2), p.201 |
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container_issue | 2 |
container_start_page | 201 |
container_title | Journal of the Electrochemical Society |
container_volume | 111 |
creator | Handelman, E. Tannenbaum Povilonis, E. I. |
description | |
doi_str_mv | 10.1149/1.2426083 |
format | Article |
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identifier | ISSN: 0013-4651 |
ispartof | Journal of the Electrochemical Society, 1964, Vol.111 (2), p.201 |
issn | 0013-4651 |
language | eng |
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source | Institute of Physics Journals |
title | Epitaxial Growth of Silicon by Vacuum Sublimation |
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