Selected Area Deposition of Single Crystal Silicon on Amorphous Quartz
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| Veröffentlicht in: | Journal of the Electrochemical Society 1966, Vol.113 (10), p.1091 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| container_issue | 10 |
| container_start_page | 1091 |
| container_title | Journal of the Electrochemical Society |
| container_volume | 113 |
| creator | Filby, J. D. Nielsen, S. |
| description | |
| doi_str_mv | 10.1149/1.2423763 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0013-4651 |
| ispartof | Journal of the Electrochemical Society, 1966, Vol.113 (10), p.1091 |
| issn | 0013-4651 |
| language | eng |
| recordid | cdi_crossref_primary_10_1149_1_2423763 |
| source | IOP Publishing Journals |
| title | Selected Area Deposition of Single Crystal Silicon on Amorphous Quartz |
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