Preparation and Properties of Pyrolytic Zirconium Dioxide Films

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Bibliographische Detailangaben
Veröffentlicht in:	J. Electrochem. Soc. 118: 747-54(May 1971) 1971, Vol.118 (5), p.747
Hauptverfasser:	Tauber, R. N., Dumbri, A. C., Caffrey, R. E.
Format:	Artikel
Sprache:	eng
Schlagworte:	CHEMICAL REACTIONS ELECTRIC CONDUCTIVITY MICROSTRUCTURE N30220 -Metals, Ceramics, & Other Materials-Ceramics & Cermets-Preparation & Fabrication N30230 -Metals, Ceramics, & Other Materials-Ceramics & Cermets-Properties Evaluations N33120 -Physics (Solid State)-Physical Properties OPTICAL PROPERTIES SILICON SOLIDIFICATION SUBSTRATES VAPORS ZIRCONIUM OXIDES ZIRCONIUM OXIDES/ properties of thin chemical vapor-deposited films of, chemical, electric, and structural ZIRCONIUM OXIDES/preparation of thin pyrolytic films of, by chemical vapor deposition on silicon substrates
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