Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate Glass
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| Veröffentlicht in: | Journal of the Electrochemical Society 1972, Vol.119 (4), p.545 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
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| container_issue | 4 |
| container_start_page | 545 |
| container_title | Journal of the Electrochemical Society |
| container_volume | 119 |
| creator | Brooks, A. D. Donovan, R. P. Hardesty, C. A. |
| description | |
| doi_str_mv | 10.1149/1.2404250 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0013-4651 |
| ispartof | Journal of the Electrochemical Society, 1972, Vol.119 (4), p.545 |
| issn | 0013-4651 |
| language | eng |
| recordid | cdi_crossref_primary_10_1149_1_2404250 |
| source | IOP Publishing Journals |
| title | Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate Glass |
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