Interdependence of Parameters in Reactive Sputtering of Manganese in Oxygen
Gespeichert in:
| Veröffentlicht in: | Journal of the Electrochemical Society 1972, Vol.119 (2), p.183 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | 2 |
| container_start_page | 183 |
| container_title | Journal of the Electrochemical Society |
| container_volume | 119 |
| creator | Locker, L D. Landorf, R. W. Naegele, C. L. Vratny, F. |
| description | |
| doi_str_mv | 10.1149/1.2404157 |
| format | Article |
| fullrecord | <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1149_1_2404157</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1149_1_2404157</sourcerecordid><originalsourceid>FETCH-LOGICAL-c194t-fec8fa0f377cfbb2bce363c7a0411a03b2fff22fa7ad44acbaf9dbaa7705068d3</originalsourceid><addsrcrecordid>eNotj81OwzAQhH0AiVI48Aa5ckjxxk6cHFHFT0VRUQvnaO3sRkHUjeyA6NuTiJ5GM_o0mhHiBuQCQFd3sMi01JCbMzGTElSqixwuxGWMn6OFUpuZeFn5gUJDPfmGvKPkwMkbBtzTGMek88mW0A3dDyW7_nsYw863E_SKvkVPkSZm83tsyV-Jc8avSNcnnYuPx4f35XO63jytlvfr1EGlh5TJlYySlTGOrc2sI1UoZ3DcCiiVzZg5yxgNNlqjs8hVYxGNkbksykbNxe1_rwuHGANx3Yduj-FYg6yn5zXUp-fqD3ypTtc</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Interdependence of Parameters in Reactive Sputtering of Manganese in Oxygen</title><source>IOP Publishing Journals</source><creator>Locker, L D. ; Landorf, R. W. ; Naegele, C. L. ; Vratny, F.</creator><creatorcontrib>Locker, L D. ; Landorf, R. W. ; Naegele, C. L. ; Vratny, F.</creatorcontrib><identifier>ISSN: 0013-4651</identifier><identifier>DOI: 10.1149/1.2404157</identifier><language>eng</language><ispartof>Journal of the Electrochemical Society, 1972, Vol.119 (2), p.183</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c194t-fec8fa0f377cfbb2bce363c7a0411a03b2fff22fa7ad44acbaf9dbaa7705068d3</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,4009,27902,27903,27904</link.rule.ids></links><search><creatorcontrib>Locker, L D.</creatorcontrib><creatorcontrib>Landorf, R. W.</creatorcontrib><creatorcontrib>Naegele, C. L.</creatorcontrib><creatorcontrib>Vratny, F.</creatorcontrib><title>Interdependence of Parameters in Reactive Sputtering of Manganese in Oxygen</title><title>Journal of the Electrochemical Society</title><issn>0013-4651</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1972</creationdate><recordtype>article</recordtype><recordid>eNotj81OwzAQhH0AiVI48Aa5ckjxxk6cHFHFT0VRUQvnaO3sRkHUjeyA6NuTiJ5GM_o0mhHiBuQCQFd3sMi01JCbMzGTElSqixwuxGWMn6OFUpuZeFn5gUJDPfmGvKPkwMkbBtzTGMek88mW0A3dDyW7_nsYw863E_SKvkVPkSZm83tsyV-Jc8avSNcnnYuPx4f35XO63jytlvfr1EGlh5TJlYySlTGOrc2sI1UoZ3DcCiiVzZg5yxgNNlqjs8hVYxGNkbksykbNxe1_rwuHGANx3Yduj-FYg6yn5zXUp-fqD3ypTtc</recordid><startdate>1972</startdate><enddate>1972</enddate><creator>Locker, L D.</creator><creator>Landorf, R. W.</creator><creator>Naegele, C. L.</creator><creator>Vratny, F.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>1972</creationdate><title>Interdependence of Parameters in Reactive Sputtering of Manganese in Oxygen</title><author>Locker, L D. ; Landorf, R. W. ; Naegele, C. L. ; Vratny, F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c194t-fec8fa0f377cfbb2bce363c7a0411a03b2fff22fa7ad44acbaf9dbaa7705068d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1972</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Locker, L D.</creatorcontrib><creatorcontrib>Landorf, R. W.</creatorcontrib><creatorcontrib>Naegele, C. L.</creatorcontrib><creatorcontrib>Vratny, F.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of the Electrochemical Society</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Locker, L D.</au><au>Landorf, R. W.</au><au>Naegele, C. L.</au><au>Vratny, F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Interdependence of Parameters in Reactive Sputtering of Manganese in Oxygen</atitle><jtitle>Journal of the Electrochemical Society</jtitle><date>1972</date><risdate>1972</risdate><volume>119</volume><issue>2</issue><spage>183</spage><pages>183-</pages><issn>0013-4651</issn><doi>10.1149/1.2404157</doi><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0013-4651 |
| ispartof | Journal of the Electrochemical Society, 1972, Vol.119 (2), p.183 |
| issn | 0013-4651 |
| language | eng |
| recordid | cdi_crossref_primary_10_1149_1_2404157 |
| source | IOP Publishing Journals |
| title | Interdependence of Parameters in Reactive Sputtering of Manganese in Oxygen |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-26T06%3A51%3A43IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Interdependence%20of%20Parameters%20in%20Reactive%20Sputtering%20of%20Manganese%20in%20Oxygen&rft.jtitle=Journal%20of%20the%20Electrochemical%20Society&rft.au=Locker,%20L%20D.&rft.date=1972&rft.volume=119&rft.issue=2&rft.spage=183&rft.pages=183-&rft.issn=0013-4651&rft_id=info:doi/10.1149/1.2404157&rft_dat=%3Ccrossref%3E10_1149_1_2404157%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |