The influence of lithographic patterning on current distribution in electrodeposition : experimental study and mass-transfer effects

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Veröffentlicht in:Journal of the Electrochemical Society 1993-12, Vol.140 (12), p.3497-3505
Hauptverfasser: MEHDIZADEH, S, DUKOVIC, J, ANDRICACOS, P. C, ROMANKIW, L. T, CHEH, H. Y
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container_title Journal of the Electrochemical Society
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creator MEHDIZADEH, S
DUKOVIC, J
ANDRICACOS, P. C
ROMANKIW, L. T
CHEH, H. Y
description
doi_str_mv 10.1149/1.2221118
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ispartof Journal of the Electrochemical Society, 1993-12, Vol.140 (12), p.3497-3505
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source IOP Publishing Journals
subjects Chemistry
Electrochemistry
Electrodeposition
Exact sciences and technology
General and physical chemistry
Study of interfaces
title The influence of lithographic patterning on current distribution in electrodeposition : experimental study and mass-transfer effects
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