Test Methods for Measuring Bulk Copper and Nickel in Heavily Doped p-Type Silicon Wafers

Test Methods for Measuring Bulk Copper and Nickel in Heavily Doped p-Type Silicon Wafers

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Veröffentlicht in:Journal of the Electrochemical Society 2006, Vol.153 (6), p.G566
Hauptverfasser: Fabry, Laszlo, Hoelzl, Robert, Andrukhiv, Andre, Matsumoto, Kei, Qiu, Joann, Koveshnikov, Sergei, Goldstein, Michael, Grabau, Ann, Horie, Hiroshi, Takeda, Ryuji
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container_issue 6
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container_title Journal of the Electrochemical Society
container_volume 153
creator Fabry, Laszlo
Hoelzl, Robert
Andrukhiv, Andre
Matsumoto, Kei
Qiu, Joann
Koveshnikov, Sergei
Goldstein, Michael
Grabau, Ann
Horie, Hiroshi
Takeda, Ryuji
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doi_str_mv 10.1149/1.2186799
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title Test Methods for Measuring Bulk Copper and Nickel in Heavily Doped p-Type Silicon Wafers
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