Performance impact of monolayer coating of polysilicon micromotors

Performance impact of monolayer coating of polysilicon micromotors

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Veröffentlicht in:Journal of the Electrochemical Society 1995-04, Vol.142 (4), p.1278-1285
Hauptverfasser: DENG, K, COLLINS, R. J, MEHRAN MEHREGANY, SUKENIK, C. N
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Sprache:eng
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Applied sciences
Electrical engineering. Electrical power engineering
Electrical machines
Exact sciences and technology
Special rotating machines
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container_title Journal of the Electrochemical Society
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creator DENG, K
COLLINS, R. J
MEHRAN MEHREGANY
SUKENIK, C. N
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doi_str_mv 10.1149/1.2044164
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ispartof Journal of the Electrochemical Society, 1995-04, Vol.142 (4), p.1278-1285
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1945-7111
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source Institute of Physics Journals
subjects Applied sciences
Electrical engineering. Electrical power engineering
Electrical machines
Exact sciences and technology
Special rotating machines
title Performance impact of monolayer coating of polysilicon micromotors
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