Metallic impurity gettering and secondary defect formation in megaelectron volt self-implanted Czochralski and float-zone silicon

Bibliographische Detailangaben

Veröffentlicht in:	Journal of the Electrochemical Society 1997-08, Vol.144 (8), p.2872-2881
Hauptverfasser:	BROWN, R. A, KONONCHUK, O, BONDARENKO, I, ROMANOWSKI, A, RADZIMSKI, Z, ROZGONYI, G. A, GONZALEZ, F
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Doping and impurity implantation in germanium and silicon Exact sciences and technology Interaction between different crystal defects gettering effect Physics Structure of solids and liquids crystallography
Online-Zugang:	Volltext
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