Dielectric and barrier properties of spin-on organic aromatic low dielectric constant polymers FLARE and SiLK

Bibliographische Detailangaben

Veröffentlicht in:	Journal of the Electrochemical Society 2001-06, Vol.148 (6), p.F109-F114
Hauptverfasser:	WU, Zhen-Cheng, SHIUNG, Zhi-Wen, YU, Chen-Hua, LIANG, Mong-Song, WU, Ren-Guay, LIU, Yu-Lin, WU, Wei-Hao, TSUI, Bing-Yue, CHEN, Mao-Chieh, WENG CHANG, CHOU, Pei-Fen, JANG, Syun-Ming
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Exact sciences and technology Integrated circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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