Hydrogen Impermeability of TiN Films and Its Dependence on Nitrogen Concentration at High Temperatures

Hydrogen Impermeability of TiN Films and Its Dependence on Nitrogen Concentration at High Temperatures

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Veröffentlicht in:Journal of the Electrochemical Society 2001, Vol.148 (1), p.E52
Hauptverfasser: Nishikiori, Tokujiro, Nohira, Toshiyuki, Ito, Yasuhiko
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creator Nishikiori, Tokujiro
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Ito, Yasuhiko
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title Hydrogen Impermeability of TiN Films and Its Dependence on Nitrogen Concentration at High Temperatures
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