(Invited) Transistor Applications Using Vertical III-V Nanowires on Si Platform

Vertical III-V nanowire (NW) is a promising channel material for high-speed switching devices in future integrated circuits because surrounding-gate structures have good electrostatic gate controllability while suppressing inherent large leakage current in III-V channels and outperform lateral switc...

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Veröffentlicht in:ECS transactions 2017-08, Vol.80 (1), p.43-52
Hauptverfasser: Tomioka, Katsuhiro, Fukui, Takashi
Format: Artikel
Sprache:eng
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Zusammenfassung:Vertical III-V nanowire (NW) is a promising channel material for high-speed switching devices in future integrated circuits because surrounding-gate structures have good electrostatic gate controllability while suppressing inherent large leakage current in III-V channels and outperform lateral switching devices in terms of power consumption while keeping good scalability. As for the integration of III-V NWs on Si, direct integration of vertical III-V NWs by selective-area growth has advantages for high -performance transistor applications because of position/size-uniformity and core-shell structure with modulation doping.
ISSN:1938-5862
1938-6737
1938-6737
1938-5862
DOI:10.1149/08001.0043ecst