Development of a Catalytic Combustion Type Gas Sensor with Low Power Consumption

A catalytic combustion type methane gas sensor with super low power consumption using MEMS technology was developed for a battery drive type gas alarm. In this study, it is reported the actions of improvement for methane gas selectivity and sensitivity of the sensor from a viewpoint of the reliabili...

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Bibliographische Detailangaben

Hauptverfasser:	Hadano, Hironori, Miyagi, Atsuko, Okuno, Tatsuyuki, Nagawa, Yoshiharu, Ishiguro, Yoshiaki
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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