Development of a Catalytic Combustion Type Gas Sensor with Low Power Consumption

A catalytic combustion type methane gas sensor with super low power consumption using MEMS technology was developed for a battery drive type gas alarm. In this study, it is reported the actions of improvement for methane gas selectivity and sensitivity of the sensor from a viewpoint of the reliability satisfaction for practical use. As the method of improving gas selectivity, it was made to offset with constituting a reference element from a Platinum loaded catalyst. For the improvement of methane sensitivity, the amount of loaded Palladium was made to optimize in order to increase gas reactive sites on catalyst. And slit-shaped through-holes were formed on micro heater, as taking advantage of air bridge structure for promoting the gas contact from the heater backside. Methane sensitivity has improved drastically by these complex improvement effects.