Nanoscale Potential Fluctuation in Non-Stoichiometric Hafnium Suboxides

Nanoscale Potential Fluctuation in Non-Stoichiometric Hafnium Suboxides

We study the structure of nonstoichiometric HfO x films with variable composition using methods of X-ray photoelectron spectroscopy and spectroscopic ellipsometry. HfO x , to a first approximation, is a mixture of HfO 2 and Hf metal with a small amount (~10–15%) of hafnium sub-oxide HfO y ( y < 2...

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Hauptverfasser: Orlov, Oleg M., Krasnikov, Gennady Ja, Gritsenko, Vladimir A., Kruchinin, Vladimir N., Perevalov, Timofey V., Aliev, Vladimir Sh, Islamov, Damir R., Prosvirin, Igor P.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:We study the structure of nonstoichiometric HfO x films with variable composition using methods of X-ray photoelectron spectroscopy and spectroscopic ellipsometry. HfO x , to a first approximation, is a mixture of HfO 2 and Hf metal with a small amount (~10–15%) of hafnium sub-oxide HfO y ( y < 2).
ISSN:1938-5862
1938-6737
DOI:10.1149/06905.0237ecst