(Keynote) X-ray Metrology for Advanced Technology Nodes

Latest innovations in high brightness X-ray sources, more efficient X-ray detectors combined to the intrinsic capability of X-rays to probe materials at sub nanometer scale are opening new opportunities for the characterization of new materials and structures like FINFETs at the advanced technology...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Vigliante, Assunta, Lin, Wayne J.
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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