Optical Property of Random Inverted-Pyramid Textures on Si Surface by Etching with N-Fluoropyridinium Salts
We have proposed a new photo-etching method to form Si surface textures with N-fluoropyridinium salts. Si is etched by applying N-fluoropyridinium salts to its surface and exposing the surface to light. Etching depth increases with light intensity. We have formed random inverted-pyramid textures on...
Gespeichert in:
Hauptverfasser: | , , , , , , , , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | We have proposed a new photo-etching method to form Si surface textures with N-fluoropyridinium salts. Si is etched by applying N-fluoropyridinium salts to its surface and exposing the surface to light. Etching depth increases with light intensity. We have formed random inverted-pyramid textures on a Si surface by controlling the light intensity at a constant temperature. |
---|---|
ISSN: | 1938-5862 1938-6737 |
DOI: | 10.1149/05051.0109ecst |